| 10705439 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +12 more |
2020-07-07 |
| 10599054 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +8 more |
2020-03-24 |
| 10423081 |
Reticle cooling by non-uniform gas flow |
Thomas Venturino, Geoffrey Alan Schultz, Daniel N. Galburt, Daniel Nathan Burbank, Santiago E. DELPUERTO +3 more |
2019-09-24 |
| 10331047 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +8 more |
2019-06-25 |
| 9904185 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +12 more |
2018-02-27 |
| 9746788 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +8 more |
2017-08-29 |
| 9715178 |
Immersion photolithography system and method using microchannel nozzles |
Klaus Simon, Antonius Theodorus Anna Maria Derksen |
2017-07-25 |
| 9709899 |
Immersion photolithography system and method using microchannel nozzles |
Klaus Simon, Antonius Theodorus Anna Maria Derksen |
2017-07-18 |
| 9507278 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +12 more |
2016-11-29 |
| 9488923 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +8 more |
2016-11-08 |
| 9097992 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederick De Graaf, Christiaan Alexander Hoogendam +12 more |
2015-08-04 |
| 9081311 |
Lithographic apparatus and device manufacturing method |
Jeroen Gerard Gosen, Bart Dinand Paarhuis, Frank Johannes Jacobus Van Boxtel, Jinggao Li |
2015-07-14 |
| 8817230 |
Immersion photolithography system and method using microchannel nozzles |
Klaus Simon, Antonius Theodorus Anna Maria Derksen |
2014-08-26 |
| 8755028 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +8 more |
2014-06-17 |
| 8730450 |
Immersion photolithography system and method using microchannel nozzles |
Klaus Simon, Antonius Theodorus Anna Maria Derksen |
2014-05-20 |
| 8670105 |
Immersion photolithography system and method using microchannel nozzles |
Klaus Simon, Antonius Theodorus Anna Maria Derksen |
2014-03-11 |
| 8446563 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +12 more |
2013-05-21 |
| 8441610 |
Assembly comprising a conditioning system and at least one object, a conditioning system, a lithographic apparatus and methods |
Ronald Van Der Ham, Tjarko Adriaan Rudolf Van Empel, Niek Jacobus Johannes Roset |
2013-05-14 |
| 8210248 |
Method and systems for compact, micro-channel, laminar heat exchanging |
— |
2012-07-03 |
| 8031325 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +8 more |
2011-10-04 |
| 8004649 |
Immersion photolithography system and method using microchannel nozzles |
Klaus Simon, Antonius Theodorus Anna Maria Derksen |
2011-08-23 |
| 7924399 |
Assembly comprising a conditioning system and at least one object, a conditioning system, a lithographic apparatus and methods |
Ronald Van Der Ham, Tjarko Adriaan Rudolf Van Empel, Niek Jacobus Johannes Roset |
2011-04-12 |
| 7701550 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +8 more |
2010-04-20 |
| 7619718 |
Method and system for active purging of pellicle volumes |
Florence Luo, George Hilary Harrold, Nicolaas Ten Kate |
2009-11-17 |
| 7602470 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christian Alexander Hoogendam +12 more |
2009-10-13 |