Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10908518 | Lithographic apparatus and method | Antonius Franciscus Johannes De Groot, Kenneth C. Henderson, Raymond Wilhelmus Louis Lafarre, Matthew Lipson, Louis John Markoya +3 more | 2021-02-02 |
| 10423081 | Reticle cooling by non-uniform gas flow | Thomas Venturino, Geoffrey Alan Schultz, Daniel N. Galburt, Daniel Nathan Burbank, Herman Vogel +3 more | 2019-09-24 |