Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10642166 | Patterning device cooling apparatus | Güneş Nakibo{hacek over (g)}lu, Lowell Lane Baker, Ruud Hendrikus Martinus Johannes Bloks, Hakki Ergün Cekli, Laurentius Johannes Adrianus Van Bokhoven +3 more | 2020-05-05 |
| 10423081 | Reticle cooling by non-uniform gas flow | Thomas Venturino, Daniel N. Galburt, Daniel Nathan Burbank, Santiago E. DELPUERTO, Herman Vogel +3 more | 2019-09-24 |
| 10394139 | Patterning device cooling apparatus | Güneş Nak{dot over (i)}bo{hacek over (g)}lu, Lowell Lane Baker, Ruud Hendrikus Martinus Johannes Bloks, Hakki Ergün Cekli, Laurentius Johannes Adrianus Van Bokhoven +3 more | 2019-08-27 |
| 9222847 | Gas gauge compatible with vacuum environments | — | 2015-12-29 |
| 8675168 | Gas gauge compatible with vacuum environments | — | 2014-03-18 |