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Lithographic apparatus, temperature sensor, and fiber Bragg grating sensor |
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Method and apparatus for predicting aberrations in a projection system |
Mhamed Akhssay |
2024-09-03 |
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Lithographic method |
Bearrach Moest, Rowin MEIJERINK, Thijs Schenkelaars, Norbertus Josephus Martinus Van Den Nieuwelaar |
2023-05-09 |
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Lithographic apparatus with improved patterning performance |
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2021-06-29 |
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Patterning device cooling apparatus |
Ruud Hendrikus Martinus Johannes Bloks, Günes NAKIBOGLU, Marinus Jan Remie, Johan Gertrudis Cornelis Kunnen |
2021-04-27 |
| 10908517 |
Setpoint generator, lithographic apparatus, lithographic apparatus operating method, and device manufacturing method |
Jean-Philippe Xavier Van Damme, Petrus Franciscus Van Gils, Gerben Pieterse |
2021-02-02 |
| 10705438 |
Lithographic method |
Andre Bernardus Jeunink, Stan Henricus Van Der Meulen, Yang-Shan Huang, Federico La Torre, Bearrach Moest +4 more |
2020-07-07 |
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Patterning device cooling apparatus |
Güneş Nakibo{hacek over (g)}lu, Lowell Lane Baker, Ruud Hendrikus Martinus Johannes Bloks, Hakki Ergün Cekli, Geoffrey Alan Schultz +3 more |
2020-05-05 |
| 10571814 |
Lithographic method |
Andre Bernardus Jeunink, Stan Henricus Van Der Meulen, Yang-Shan Huang, Federico La Torre, Bearrach Moest +4 more |
2020-02-25 |
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Reticle cooling by non-uniform gas flow |
Thomas Venturino, Geoffrey Alan Schultz, Daniel N. Galburt, Daniel Nathan Burbank, Santiago E. DELPUERTO +3 more |
2019-09-24 |
| 10394139 |
Patterning device cooling apparatus |
Güneş Nak{dot over (i)}bo{hacek over (g)}lu, Lowell Lane Baker, Ruud Hendrikus Martinus Johannes Bloks, Hakki Ergün Cekli, Geoffrey Alan Schultz +3 more |
2019-08-27 |
| 10281830 |
Patterning device cooling systems in a lithographic apparatus |
Christopher Charles Ward, Marc Léon Van Der Gaag, Johan Gertrudis Cornelis Kunnen |
2019-05-07 |
| 10222713 |
Patterning device cooling apparatus |
Ruud Hendrikus Martinus Johannes Bloks, Günes NAKIBOGLU, Marinus Jan Remie, Johan Gertrudis Cornelis Kunnen |
2019-03-05 |
| 10095129 |
Lithographic apparatus and a method of manufacturing a device using a lithographic apparatus |
Giovanni Luca Gattobigio, Erik Henricus Egidius Catharina Eummelen, Ruud Olieslagers, Gerben Pieterse, Cornelius Maria Rops |
2018-10-09 |
| 10031428 |
Gas flow optimization in reticle stage environment |
Koen Cuypers, Marcelo Henrique De Andrade Oliveira, Marinus Jan Remie, Chattarbir Singh, Henricus Anita Jozef Wilhelmus Van De Ven +9 more |
2018-07-24 |
| 9939740 |
Lithographic apparatus and device manufacturing method |
Günes NAKIBOGLU, Martijn Van Baren, Frank Johannes Jacobus Van Boxtel, Koen Cuypers, Jeroen Gerard Gosen |
2018-04-10 |
| 9625828 |
Fluid handling structure, lithographic apparatus and device manufacturing method |
Michel Riepen, Erik Henricus Egidius Catharina Eummelen, Sandra Van Der Graaf, Rogier Hendrikus Magdalena Cortie, Takeshi Kaneko +6 more |
2017-04-18 |
| 8848164 |
Fluid supply system, a lithographic apparatus, a method of varying fluid flow rate and a device manufacturing method |
Nicolaas Ten Kate, Pieter Jacob Kramer |
2014-09-30 |
| 8755026 |
Lithographic apparatus and a device manufacturing method |
Jeroen Gerard Gosen, Albert Johannes Maria Jansen, Nicolaas Ten Kate, Marco Koert Stavenga, Koen Steffens +2 more |
2014-06-17 |
| 8730448 |
Lithographic apparatus and device manufacturing method |
Han-Kwang Nienhuys, Martinus Agnes Willem Cuijpers, Nicolaas Ten Kate, Leon Martin Levasier, Jan Bernard Plechelmus Van Schoot +11 more |
2014-05-20 |
| 8553206 |
Lithographic apparatus, coverplate and device manufacturing method |
Raymond Wilhelmus Louis Lafarre, Nicolaas Ten Kate, Henricus Jozef Castelijns |
2013-10-08 |
| 8405819 |
Immersion lithographic apparatus and device manufacturing method |
Nicolaas Ten Kate, Raymond Wilhelmus Louis Lafarre, Henricus Jozef Castelijns, Petrus Martinus Gerardus Johannes Arts |
2013-03-26 |