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Imprint lithography |
Catharinus De Schiffart, Michael Jozef Mathijs Renkens, Gerard Van Schothorst, Gregor Edward Van Baars, Sander Frederik Wuister +5 more |
2024-11-19 |
| 11664264 |
Lithographic apparatus, method for unloading a substrate and method for loading a substrate |
Robby Franciscus Josephus MARTENS, Youssef Karel Maria De Vos, Ringo Petrus Cornelis VAN DORST, Gerhard Albert TEN BRINKE, Dirk Jerome Andre SENDEN +11 more |
2023-05-30 |
| 11635696 |
Imprint lithography |
Catharinus De Schiffart, Michael Jozef Mathijs Renkens, Gerard Van Schothorst, Gregor Edward Van Baars, Sander Frederik Wuister +5 more |
2023-04-25 |
| 10908510 |
Imprint lithography |
Catharinus De Schiffart, Michael Jozef Mathijs Renkens, Gerard Van Schothorst, Gregor Edward Van Baars, Sander Frederik Wuister +5 more |
2021-02-02 |
| 10890851 |
Imprint lithography |
Catharinus De Schiffart, Michael Jozef Mathijs Renkens, Gerard Van Schothorst, Gregor Edward Van Baars, Sander Frederik Wuister +5 more |
2021-01-12 |
| 10768535 |
Support apparatus, a lithographic apparatus and a device manufacturing method |
Robbert Arij Jeroen De Jong, Martinus Hendrikus Antonius Leenders, Evelyn Wallis Pacitti, Thomas POIESZ, Frank Pieter Albert Van Den Berkmortel |
2020-09-08 |
| 10712678 |
Imprint lithography apparatus and method |
Yvonne Wendela Kruijt-Stegeman, Arie Jeffrey Den Boef, Vadim Yevgenyevich Banine, Michael Jozef Mathijs Renkens, Gerard Van Schothorst +5 more |
2020-07-14 |
| 10705438 |
Lithographic method |
Laurentius Johannes Adrianus Van Bokhoven, Stan Henricus Van Der Meulen, Yang-Shan Huang, Federico La Torre, Bearrach Moest +4 more |
2020-07-07 |
| 10571814 |
Lithographic method |
Laurentius Johannes Adrianus Van Bokhoven, Stan Henricus Van Der Meulen, Yang-Shan Huang, Federico La Torre, Bearrach Moest +4 more |
2020-02-25 |
| 10514615 |
Support apparatus, lithographic apparatus and device manufacturing method |
Robbert Arij Jeroen De Jong, Martinus Hendrikus Antonius Leenders, Evelyn Wallis Pacitti, Thomas POIESZ, Frank Pieter Albert Van Den Berkmortel |
2019-12-24 |
| 10410914 |
Methods for providing lithography features on a substrate by self-assembly of block copolymers |
Sander Frederik Wuister, Emiel Peeters |
2019-09-10 |
| 10018926 |
Lithographic apparatus and method of manufacturing a lithographic apparatus |
Rogier Hendrikus Magdalena Cortie, Christianus Wilhelmus Johannes Berendsen, Adrianus Hendrik Koevoets, Jim Vincent Overkamp, Siegfried Alexander Tromp +2 more |
2018-07-10 |
| 9958774 |
Imprint lithography |
Arie Jeffrey Den Boef, Sander Frederik Wuister, Yvonne Wendela Kruijt-Stegeman |
2018-05-01 |
| 9915880 |
Stage apparatus, lithographic apparatus and method of positioning an object table |
Engelbertus Antonius Fransiscus Van Der Pasch, Robbert Edgar Van Leeuwen, Emiel Jozef Melanie Eussen |
2018-03-13 |
| 9864279 |
Imprint lithography |
Catharinus De Schiffart, Michael Jozef Mathijs Renkens, Gerard Van Schothorst, Gregor Edward Van Baars, Sander Frederik Wuister +5 more |
2018-01-09 |
| 9658528 |
Imprint lithography |
Yvonne Wendela Kruijt-Stegeman, Arie Jeffrey Den Boef |
2017-05-23 |
| 9606458 |
Method for calibration of an encoder scale and a lithographic apparatus |
Jeroen Dekkers, Erik Roelof Loopstra, Engelbertus Antonius Fransiscus Van Der Pasch, Michael Jozef Mathijs Renkens, Carolus Johannes Catharina Schoormans +1 more |
2017-03-28 |
| 9535322 |
Imprint lithography |
Arie Jeffrey Den Boef, Sander Frederik Wuister, Yvonne Wendela Kruijt-Stegeman |
2017-01-03 |
| 9470988 |
Substrate positioning system, lithographic apparatus and device manufacturing method |
Engelbertus Antonius Fransiscus Van Der Pasch, Albert Johannes Maria Jansen, Johannes Mathias Theodorus Antonius Adriaens, Frank Auer, Peterjan Broomans +4 more |
2016-10-18 |
| 9383659 |
Positioning system, lithographic apparatus and device manufacturing method |
Ruud Antonius Catharina Maria Beerens, Marinus Maria Johannes Van De Wal, Wilhelmus Henricus Theodorus Maria Aangenent, Richard Henricus Adrianus Van Lieshout, Henricus Martinus Johannes Van De Groes +1 more |
2016-07-05 |
| 9377697 |
Lithographic apparatus and table for use in such an apparatus |
Mark Johannes Hermanus Frencken, Frederikus Johannes Maria De Vreede, Gijs Kramer |
2016-06-28 |
| 9372396 |
Imprint lithography method |
Yvonne Wendela Kruijt-Stegeman, Johannes Petrus Martinus Bernardus Vermeulen |
2016-06-21 |
| 9372399 |
Imprint lithography method and imprintable medium |
Martinus Bernardus Van Der Mark, Vadim Yevgenyevich Banine, Johan Frederik Dijksman, Sander Frederik Wuister, Emiel Peeters +5 more |
2016-06-21 |
| 9316928 |
Stage apparatus, lithographic apparatus and method of positioning an object table |
Engelbertus Antonius Fransiscus Van Der Pasch, Emiel Jozef Melanie Eussen, Robbert Edgar Van Leeuwen |
2016-04-19 |
| 9116423 |
Imprint lithography apparatus |
Vadim Yevgenyevich Banine, Hans Butler, Engelbertus Antonius Fransiscus Van Der Pasch, Johannes Petrus Martinus Bernardus Vermeulen, Yvonne Wendela Kruijt-Stegeman |
2015-08-25 |