Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12374577 | Substrate restraining system | Marinus Augustinus Christiaan Verschuren | 2025-07-29 |
| 12321104 | Substrate holder for use in a lithographic apparatus | Coen Hubertus Matheus Baltis, Abraham Alexander Soethoudt, Mehmet Ali AKBAS, Dennis Van Den Berg, Wouter VANESCH +1 more | 2025-06-03 |
| 12158704 | Method of clamping a substrate to a clamping system, a substrate holder and a substrate support | Abraham Alexander Soethoudt | 2024-12-03 |
| 11953837 | Method, substrate and system for estimating stress in a substrate | Michel Ben Isel HABETS, Abraham Alexander Soethoudt, Herman Marquart | 2024-04-09 |
| 11664264 | Lithographic apparatus, method for unloading a substrate and method for loading a substrate | Andre Bernardus Jeunink, Robby Franciscus Josephus MARTENS, Youssef Karel Maria De Vos, Ringo Petrus Cornelis VAN DORST, Gerhard Albert TEN BRINKE +11 more | 2023-05-30 |
| 11448976 | Substrate holder for use in a lithographic apparatus | Coen Hubertus Matheus Baltis, Abraham Alexander Soethoudt, Mehmet Ali AKBAS, Dennis Van Den Berg, Wouter VANESCH +1 more | 2022-09-20 |
| 11269259 | Lithographic apparatus and a device manufacturing method | Bert Dirk SCHOLTEN, Dirk Willem Harberts, Lucas Henricus Johannes Stevens, Laura Maria Fernandez Diaz, Johannes Adrianus Cornelis Maria Pijnenburg +3 more | 2022-03-08 |
| 11187998 | Substrate holder, substrate support and method of clamping a substrate to a clamping system | Abraham Alexander Soethoudt | 2021-11-30 |
| 11086234 | Substrate holder and a method of manufacturing a device | Satish Achanta, Jeroen BOUWKNEGT, Abraham Alexander Soethoudt | 2021-08-10 |
| 10871715 | Lithographic apparatus and a device manufacturing method | Bert Dirk SCHOLTEN, Dirk Willem Harberts, Lucas Henricus Johannes Stevens, Laura Maria Fernandez Diaz, Johannes Adrianus Cornelis Maria Pijnenburg +3 more | 2020-12-22 |
| 10768535 | Support apparatus, a lithographic apparatus and a device manufacturing method | Andre Bernardus Jeunink, Robbert Arij Jeroen De Jong, Martinus Hendrikus Antonius Leenders, Evelyn Wallis Pacitti, Frank Pieter Albert Van Den Berkmortel | 2020-09-08 |
| 10719019 | Substrate holder and a method of manufacturing a substrate holder | Satish Achanta, Mehmet Ali AKBAS, Pavlo ANTONOV, Jeroen BOUWKNEGT, Joost Wilhelmus Maria FRENKEN +4 more | 2020-07-21 |
| 10656536 | Substrate support, method for loading a substrate on a substrate support location, lithographic apparatus and device manufacturing method | Martinus Hendrikus Antonius Leenders, Niek Elout De Kruijf, Mircea Dusa, Martijn Houben, Johannes Gerardus Maria Mulder +5 more | 2020-05-19 |
| 10599053 | Lithographic apparatus and method for loading a substrate | Abraham Alexander Soethoudt | 2020-03-24 |
| 10514615 | Support apparatus, lithographic apparatus and device manufacturing method | Andre Bernardus Jeunink, Robbert Arij Jeroen De Jong, Martinus Hendrikus Antonius Leenders, Evelyn Wallis Pacitti, Frank Pieter Albert Van Den Berkmortel | 2019-12-24 |
| 10453734 | Substrate holder, a lithographic apparatus and method of manufacturing devices | Martijn Houben, Abraham Alexander Soethoudt | 2019-10-22 |
| 10353303 | Lithographic apparatus and method for loading a substrate | Abraham Alexander Soethoudt | 2019-07-16 |
| 10310393 | Substrate support, method of compensating unflatness of an upper surface of a substrate, lithographic apparatus and device manufacturing method | — | 2019-06-04 |
| 9939736 | Substrate holder and support table for lithography | Martijn Houben | 2018-04-10 |
| 9798253 | Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method | Daan Daniel Johannes Antonius Van Sommeren | 2017-10-24 |