Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12243768 | Substrate holder for use in a lithographic apparatus and a device manufacturing method | Johannes Josephus MAASSEN, Andre Schreuder | 2025-03-04 |
| 11953837 | Method, substrate and system for estimating stress in a substrate | Thomas POIESZ, Michel Ben Isel HABETS, Abraham Alexander Soethoudt | 2024-04-09 |