Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12321104 | Substrate holder for use in a lithographic apparatus | Thomas POIESZ, Coen Hubertus Matheus Baltis, Mehmet Ali AKBAS, Dennis Van Den Berg, Wouter VANESCH +1 more | 2025-06-03 |
| 12158704 | Method of clamping a substrate to a clamping system, a substrate holder and a substrate support | Thomas POIESZ | 2024-12-03 |
| 11953837 | Method, substrate and system for estimating stress in a substrate | Thomas POIESZ, Michel Ben Isel HABETS, Herman Marquart | 2024-04-09 |
| 11898601 | Support table for a lithographic apparatus, method of loading a substrate, lithographic apparatus and device manufacturing method | Siegfried Alexander Tromp, Antonie Hendrik Verweij, Jan Pieter Van De Poel, Mark Constant Johannes Baggen | 2024-02-13 |
| 11664264 | Lithographic apparatus, method for unloading a substrate and method for loading a substrate | Andre Bernardus Jeunink, Robby Franciscus Josephus MARTENS, Youssef Karel Maria De Vos, Ringo Petrus Cornelis VAN DORST, Gerhard Albert TEN BRINKE +11 more | 2023-05-30 |
| 11448976 | Substrate holder for use in a lithographic apparatus | Thomas POIESZ, Coen Hubertus Matheus Baltis, Mehmet Ali AKBAS, Dennis Van Den Berg, Wouter VANESCH +1 more | 2022-09-20 |
| 11269259 | Lithographic apparatus and a device manufacturing method | Thomas POIESZ, Bert Dirk SCHOLTEN, Dirk Willem Harberts, Lucas Henricus Johannes Stevens, Laura Maria Fernandez Diaz +3 more | 2022-03-08 |
| 11187998 | Substrate holder, substrate support and method of clamping a substrate to a clamping system | Thomas POIESZ | 2021-11-30 |
| 11098759 | Support table for a lithographic apparatus, method of loading a substrate, lithographic apparatus and device manufacturing method | Siegfried Alexander Tromp, Antonie Hendrik Verweij, Jan Pieter Van De Poel, Mark Constant Johannes Baggen | 2021-08-24 |
| 11086234 | Substrate holder and a method of manufacturing a device | Thomas POIESZ, Satish Achanta, Jeroen BOUWKNEGT | 2021-08-10 |
| 10871715 | Lithographic apparatus and a device manufacturing method | Thomas POIESZ, Bert Dirk SCHOLTEN, Dirk Willem Harberts, Lucas Henricus Johannes Stevens, Laura Maria Fernandez Diaz +3 more | 2020-12-22 |
| 10656536 | Substrate support, method for loading a substrate on a substrate support location, lithographic apparatus and device manufacturing method | Martinus Hendrikus Antonius Leenders, Niek Elout De Kruijf, Mircea Dusa, Martijn Houben, Johannes Gerardus Maria Mulder +5 more | 2020-05-19 |
| 10599053 | Lithographic apparatus and method for loading a substrate | Thomas POIESZ | 2020-03-24 |
| 10527092 | Support table for a lithographic apparatus, method of loading a substrate, lithographic apparatus and device manufacturing method | Siegfried Alexander Tromp, Antonie Hendrik Verweij, Jan Pieter Van De Poel, Mark Constant Johannes Baggen | 2020-01-07 |
| 10453734 | Substrate holder, a lithographic apparatus and method of manufacturing devices | Thomas POIESZ, Martijn Houben | 2019-10-22 |
| 10353303 | Lithographic apparatus and method for loading a substrate | Thomas POIESZ | 2019-07-16 |
| 8149387 | Method of placing a substrate, method of transferring a substrate, support system and lithographic projection apparatus | Jozef Augustinus Maria Alberti, Gerardus Petrus Matthijs Van Nunen, Frans Erik Groensmit, Rene Theodorus Petrus Compen | 2012-04-03 |