| 11664264 |
Lithographic apparatus, method for unloading a substrate and method for loading a substrate |
Andre Bernardus Jeunink, Robby Franciscus Josephus MARTENS, Ringo Petrus Cornelis VAN DORST, Gerhard Albert TEN BRINKE, Dirk Jerome Andre SENDEN +11 more |
2023-05-30 |
| 10191396 |
Lithographic apparatus, object positioning system and device manufacturing method |
Paul Corné Henri DE WIT, Stijn Willem Boere, Peter Paul HEMPENIUS, Nicolaas Rudolf Kemper, Robertus Mathijs Gerardus Rijs +1 more |
2019-01-29 |
| 9946172 |
System for positioning an object in lithography |
Peter Paul HEMPENIUS, Martijn Houben, Nicolaas Rudolf Kemper, Robertus Mathijs Gerardus Rijs, Paul Corné Henri DE WIT +2 more |
2018-04-17 |
| 9378722 |
Lithographic apparatus with actuator to compensate acoustic vibration |
Hans Butler, Marc Wilhelmus Maria Van Der Wijst, Johan Geerke, Peter Paul HEMPENIUS, Joost De Pee +5 more |
2016-06-28 |
| 8928860 |
Lithographic apparatus having a chuck with a visco-elastic damping layer |
Peter Paul HEMPENIUS, Dirk-Jan Bijvoet, Ramidin Izair Kamidi |
2015-01-06 |
| 8885147 |
Lithographic apparatus and device manufacturing method |
Michael Johannes Vervoordeldonk, Ronald Casper Kunst, Johannes Hubertus Antonius Van De Rijdt, Robertus Jacobus Theodorus Van Kempen |
2014-11-11 |
| 8830442 |
Servo control system, lithographic apparatus and control method |
Dirk-Jan Bijvoet, Ronald Casper Kunst, Ramidin Izair Kamidi, Khalid Manssouri |
2014-09-09 |
| 8310651 |
Lithographic apparatus, method and device manufacturing method |
Peter Paul HEMPENIUS, Johan Geerke, Nicolaas Bernardus Roozen, Erwin Antonius Henricus Fransiscus Van Den Boogaert, Alexander Cornelis Geerlings |
2012-11-13 |
| 7969550 |
Lithographic apparatus and device manufacturing method |
Johan Geerke, Peter Paul HEMPENIUS, Clementius Andreas Johannes Beijers |
2011-06-28 |
| 7884919 |
Lithographic apparatus and device manufacturing method |
Peter Paul HEMPENIUS, Marcel Koenraad Marie Baggen, Dirk-Jan Bijvoet, Sjoerd Nicolaas Lambertus Donders |
2011-02-08 |
| 7782446 |
Stage system and lithographic apparatus comprising such stage system |
Ramidin Izair Kamidi, Henrikus Herman Marie Cox, Ronald Casper Kunst |
2010-08-24 |
| 7742149 |
Stage system and lithographic apparatus comprising such a stage system |
Ronald Casper Kunst, Patricia Vreugdewater, Peter Paul HEMPENIUS |
2010-06-22 |
| 7657334 |
Lithographic apparatus and control method |
Ronald Casper Kunst, Yin Tim Tso, Ramidin Izair Kamidi |
2010-02-02 |
| 7379156 |
Lithographic apparatus and device manufacturing method |
Ronald Casper Kunst, Yin Tim Tso, Ramidln Izair Kamidi |
2008-05-27 |
| 7256866 |
Lithographic apparatus and device manufacturing method |
Henrikus Herman Marie Cox, Hans Butler, Ronald Casper Kunst, Harmen Klaas Van Der Schoot |
2007-08-14 |