Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10114299 | Lithographic apparatus | Günes NAKIBOGLU, Mark Constant Johannes Baggen, Gerard Johannes Boogaard, Nicolaas Rudolf Kemper, Sander Kerssemakers +6 more | 2018-10-30 |
| 9378722 | Lithographic apparatus with actuator to compensate acoustic vibration | Hans Butler, Marc Wilhelmus Maria Van Der Wijst, Johan Geerke, Peter Paul HEMPENIUS, Youssef Karel Maria De Vos +5 more | 2016-06-28 |
| 8310651 | Lithographic apparatus, method and device manufacturing method | Peter Paul HEMPENIUS, Johan Geerke, Youssef Karel Maria De Vos, Nicolaas Bernardus Roozen, Alexander Cornelis Geerlings | 2012-11-13 |