| 12306544 |
Metrology tool with position control of projection system |
Arie Jeffrey Den Boef, Mark Constant Johannes Baggen, Jeroen Arnoldus Leonardus Johannes Raaymakers, Richard Carl Zimmerman |
2025-05-20 |
| 12210294 |
Actuator assemblies comprising piezo actuators or electrostrictive actuators |
Bas JANSEN |
2025-01-28 |
| 12147167 |
Imprint apparatus with movable stages |
Junichi KANEHARA, Paul Corné Henri DE WIT, Engelbertus Antonius Fransiscus Van Der Pasch |
2024-11-19 |
| 11940739 |
Metrology apparatus |
Nitesh Pandey, Arie Jeffrey Den Boef, Duygu Akbulut, Marinus Johannes Maria Van Dam, Hugo Augustinus Joseph Cramer +4 more |
2024-03-26 |
| 11914308 |
Lithographic apparatus |
Engelbertus Antonius Fransiscus Van Der Pasch, Paul Corné Henri DE WIT |
2024-02-27 |
| 11880144 |
Object table, a stage apparatus and a lithographic apparatus |
Sander Jeroen HERMANUSSEN, Johannes Petrus Martinus Bernardus Vermeulen, Bas JANSEN, Michael Marinus Anna STEUR |
2024-01-23 |
| 11789373 |
Object positioning system diagnostic and calibration methods positioning control method lithographic apparatus and device manufacturing method |
Bas JANSEN, Samer Abdelmoeti Abuzeid Abdelmoeti, Koen Johan Frederik Loonen, Aditya Singh, Ruben Etienne Johan Rinus Vandervelden |
2023-10-17 |
| 11609503 |
Lithographic apparatus |
Engelbertus Antonius Fransiscus Van Der Pasch, Paul Corné Henri DE WIT |
2023-03-21 |
| 11561479 |
Electronic system, accelerometer, calibration method, lithographic apparatus and device manufacturing method |
Bas JANSEN, Cornelius Adrianus Lambertus De Hoon |
2023-01-24 |
| 11543756 |
Lithographic apparatus and method |
— |
2023-01-03 |
| 11467505 |
Height sensor, lithographic apparatus and method for manufacturing devices |
Johannes Petrus Martinus Bernardus Vermeulen, Marinus Petrus REIJNDERS |
2022-10-11 |
| 11467504 |
Piezoelectric actuator, actuator system, substrate support, and lithographic apparatus including the actuator |
Bas JANSEN, Alexander Pascal Dijkshoorn |
2022-10-11 |
| 11302512 |
Electron beam inspection apparatus stage positioning |
Marcel Koenraad Marie Baggen, Antonius Henricus Arends, Lucas KUINDERSMA, Johannes Hubertus Antonius Van De Rijdt, Peter Paul HEMPENIUS +5 more |
2022-04-12 |
| 11269262 |
Frame assembly, lithographic apparatus and device manufacturing method |
Joep Sander De Beer, Cornelius Adrianus Lambertus De Hoon, Jeroen Pieter Starreveld, Martinus Van Duijnhoven, Maurice Willem Jozef Etiënne Wijckmans |
2022-03-08 |
| 11262661 |
Metrology apparatus |
Nitesh Pandey, Arie Jeffrey Den Boef, Duygu Akbulut, Marinus Johannes Maria Van Dam, Hugo Augustinus Joseph Cramer +4 more |
2022-03-01 |
| 11169450 |
Pneumatic support device and lithographic apparatus with pneumatic support device |
Joep Sander De Beer, Cornelius Adrianus Lambertus De Hoon, Jeroen Pieter Starreveld, Martinus Van Duijnhoven, Maurice Willem Jozef Etiënne Wijckmans |
2021-11-09 |
| 11150560 |
Projection system and mirror and radiation source for a lithographic apparatus |
Marcus Adrianus Van De Kerkhof, Anton Bernhard Van Oosten, Erik Roelof Loopstra, Marc Wilhelmus Maria Van Der Wijst, Koen Jacobus Johannes Maria Zaal |
2021-10-19 |
| 11029612 |
Bearing device, magnetic gravity compensator, vibration isolation system, lithographic apparatus, and method to control a gravity compensator having a negative stiffness |
Maarten Hartger Kimman, Olof Martinus Josephus Fischer, Christiaan Alexander Hoogendam, Theodorus Mattheus Joannus Maria Huizinga, Johannes Marinus Maria ROVERS +2 more |
2021-06-08 |
| 10976675 |
Lithographic apparatus |
Engelbertus Antonius Fransiscus Van Der Pasch, Paul Corné Henri DE WIT |
2021-04-13 |
| 10962891 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko +15 more |
2021-03-30 |
| 10962890 |
Positioning device, lithographic apparatus, method for compensating a balance mass torque and device manufacturing method |
Wilhelmus Franciscus Johannes Simons, Dave Braaksma, Hendrikus Herman Marie Cox, René Wilhelmus Antonius Hubertus LEENAARS, Stephan Christiaan Quintus Libourel +2 more |
2021-03-30 |
| 10955761 |
Lithographic apparatus, lithographic projection apparatus and device manufacturing method |
Maurice Willem Jozef Etiënne Wijckmans |
2021-03-23 |
| 10921720 |
Support structure, method and lithographic apparatus |
— |
2021-02-16 |
| 10866529 |
Lithographic apparatus and device manufacturing method |
Michael Johannes Vervoordeldonk, Maurice Willem Jozef Etiënne Wijckmans |
2020-12-15 |
| 10816910 |
Vibration isolator, lithographic apparatus and device manufacturing method |
Cornelius Adrianus Lambertus De Hoon, Fransiscus Mathijs Jacobs, Pavel Kagan, Jeroen Pieter Starreveld, Maurice Willem Jozef Etiënne Wijckmans |
2020-10-27 |