Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11262663 | Tubular linear actuator, patterning device masking device and lithographic apparatus | Peter Michel Silvester Maria Heijmans, Maarten Hartger Kimman, Edwin Van Horne, Antonie Hendrik Verweij | 2022-03-01 |
| 11029612 | Bearing device, magnetic gravity compensator, vibration isolation system, lithographic apparatus, and method to control a gravity compensator having a negative stiffness | Maarten Hartger Kimman, Hans Butler, Christiaan Alexander Hoogendam, Theodorus Mattheus Joannus Maria Huizinga, Johannes Marinus Maria ROVERS +2 more | 2021-06-08 |
| 10955759 | Lithographic apparatus and device manufacturing method | Hendrikus Herman Marie Cox | 2021-03-23 |
| 10437160 | Lorentz actuator, object positioning system, lithographic apparatus and Lorentz actuator operating method | Fidelus Adrianus Boon | 2019-10-08 |
| 9535340 | Support for a movable element and lithography apparatus | Fidelus Adrianus Boon, Sven Antoin Johan Hol | 2017-01-03 |
| 9519230 | Magnetic device and lithographic apparatus | Fidelus Adrianus Boon | 2016-12-13 |
| 9494869 | Lithographic apparatus and device manufacturing method | Hans Butler, Arno Jan Bleeker, Pieter Renaat Maria Hennus, Martinus Hendricus Hoeks, Sven Antoin Johan Hol +9 more | 2016-11-15 |