Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837931 | Multiphase linear motor, multiphase planar motor, stage, lithographic apparatus and device manufacturing method | Dave Braaksma, Peter Michel Silvester Maria Heijmans, Christiaan Alexander Hoogendam | 2023-12-05 |
| 11621142 | Substrate positioning device and electron beam inspection tool | Marcel Koenraad Marie Baggen, Peter Paul HEMPENIUS, Maarten Frans Janus Kremers, Robertus Jacobus Theodorus Van Kempen, Sven Antoin Johan Hol +3 more | 2023-04-04 |
| 11303175 | Multiphase linear motor, multiphase planar motor, stage, lithographic apparatus and device manufacturing method | Dave Braaksma, Peter Michel Silvester Maria Heijmans, Christiaan Alexander Hoogendam | 2022-04-12 |
| 11262663 | Tubular linear actuator, patterning device masking device and lithographic apparatus | Peter Michel Silvester Maria Heijmans, Olof Martinus Josephus Fischer, Edwin Van Horne, Antonie Hendrik Verweij | 2022-03-01 |
| 11156925 | Positioning system for a lithographic apparatus | Jasper Wesselingh | 2021-10-26 |
| 11029612 | Bearing device, magnetic gravity compensator, vibration isolation system, lithographic apparatus, and method to control a gravity compensator having a negative stiffness | Hans Butler, Olof Martinus Josephus Fischer, Christiaan Alexander Hoogendam, Theodorus Mattheus Joannus Maria Huizinga, Johannes Marinus Maria ROVERS +2 more | 2021-06-08 |
| 9447823 | Rotary connector for a rotating shank or axle | Jeroen Paul Van Schieveen | 2016-09-20 |
| 8687171 | Electromagnetic actuator, stage apparatus and lithographic apparatus | Sven Antoin Johan Hol, Jan Van Eijk, Johannes Petrus Martinus Bernardus Vermeulen, Gerard Johannes Pieter Nijsse, Simon Bernardus Cornelis Maria Martens +4 more | 2014-04-01 |