| 11621142 |
Substrate positioning device and electron beam inspection tool |
Peter Paul HEMPENIUS, Maarten Frans Janus Kremers, Robertus Jacobus Theodorus Van Kempen, Sven Antoin Johan Hol, Henricus Martinus Johannes Van De Groes +3 more |
2023-04-04 |
| 11476077 |
Interferometric stage positioning apparatus |
Wouter Onno Pril, Engelbertus Antonius Fransiscus Van Der Pasch |
2022-10-18 |
| 11315752 |
E-beam apparatus |
Peter Paul HEMPENIUS, Sven Antoin Johan Hol, Maarten Frans Janus Kremers, Henricus Martinus Johannes Van De Groes, Niels Johannes Maria Bosch |
2022-04-26 |
| 11302512 |
Electron beam inspection apparatus stage positioning |
Antonius Henricus Arends, Lucas KUINDERSMA, Johannes Hubertus Antonius Van De Rijdt, Peter Paul HEMPENIUS, Robertus Jacobus Theodorus Van Kempen +5 more |
2022-04-12 |
| 10867770 |
E-beam apparatus |
Peter Paul HEMPENIUS, Sven Antoin Johan Hol, Maarten Frans Janus Kremers, Henricus Martinus Johannes Van De Groes, Niels Johannes Maria Bosch |
2020-12-15 |
| 10809634 |
Stage system and metrology tool |
Peter Paul HEMPENIUS, Thomas Jan De Hoog, Sinar Juliana, Henricus Martinus Johannes Van De Groes |
2020-10-20 |
| 10191393 |
Lithographic apparatus, and device manufacturing method |
Jan Steven Christiaan Westerlaken, Fransiscus Mathijs Jacobs, Jeroen Arnoldus Leonardus Johannes Raaymakers, Frank Pieter Albert Van Den Berkmortel, Marc Wilhelmus Maria Van Der Wijst |
2019-01-29 |
| 9097990 |
Lithographic apparatus and stage system |
Jan-Gerard Cornelis Van Der Toorn, Stefan Geerte Kruijswijk, Jeroen Pieter Starreveld, Michael Johannes Vervoordeldonk, Mark Constant Johannes Baggen |
2015-08-04 |
| 8368868 |
Lithographic apparatus with gas pressure means for controlling a planar position of a patterning device contactless |
Johannes Petrus Martinus Bernardus Vermeulen, Hans Butler, Henrikus Herman Marie Cox, Jan Van Eijk, Andre Bernardus Jeunink +7 more |
2013-02-05 |
| 7884919 |
Lithographic apparatus and device manufacturing method |
Peter Paul HEMPENIUS, Dirk-Jan Bijvoet, Sjoerd Nicolaas Lambertus Donders, Youssef Karel Maria De Vos |
2011-02-08 |
| 7830495 |
Lithographic apparatus and position sensor |
Olaf Hubertus Wilhelmus Van Bruggen, Johannes Roland Dassel, Remko Wakker, Stoyan Nihtianov, Frank Auer +4 more |
2010-11-09 |
| 7733463 |
Lithographic apparatus and device manufacturing method |
Dirk-Jan Bijvoet, Arjan Martin Van Der Wel |
2010-06-08 |
| 7675607 |
Lithographic apparatus and device manufacturing method |
Andre Bernardus Jeunink, Dirk-Jan Bijvoet, Thomas Josephus Maria Castenmiller |
2010-03-09 |
| 7667822 |
Lithographic apparatus and stage apparatus |
Fransicus Mathijs Jacobs, Erik Roelof Loopstra, Harmen Klaas Van Der Schoot, Arjan Franklin Bakker, Arjan Martin Van Der Wel +1 more |
2010-02-23 |
| 7459701 |
Stage apparatus, lithographic apparatus and device manufacturing method |
Dirk-Jan Bijvoet, Sjoerd Nicolaas Lambertus Donders, Jan Frederik Hoogkamp, Albert Johannes Maria Jansen, Jan Jaap Kuit +4 more |
2008-12-02 |
| 7239370 |
Lithographic apparatus and device manufacturing method |
Albert Johannes Maria Jansen, Johannes Christiaan Maria Jasper, Raymond Laurentius Johannes Schrijver, Richard Joseph Bruls, Johannes Jacobus Matheus Baselmans +2 more |
2007-07-03 |
| 6707530 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby |
Raymond Laurentius Johannes Schrijver, Tjarko Adriaan Rudolf Van Empel |
2004-03-16 |
| 6542220 |
Purge gas systems for use in lithographic projection apparatus |
Raymond Laurentius Johannes Schrijver, Tjarko Adriaan Rudolf Van Empel, Bernardus Antonius Johannes Luttikhuis, Yim-Bun Patrick Kwan, Erik Roelof Loopstra |
2003-04-01 |