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Lithographic apparatus and device manufacturing method |
Andre Bernardus Jeunink, Marcel Koenraad Marie Baggen, Dirk-Jan Bijvoet |
2010-03-09 |
| 7655367 |
Lithographic apparatus and device manufacturing method |
Erik Petrus Buurman, Johannes Wilhelmus Maria Cornelis Teeuwsen, Bearrach Moest, Marc Antonius Maria Haast |
2010-02-02 |
| 7595863 |
Lithographic apparatus, excimer laser and device manufacturing method |
Robertus Cornelis Martinus Kruif, Richard Joseph Bruls, Johannes Wilhelmus De Klerk, Erik Petrus Buurman |
2009-09-29 |
| 7564536 |
Lithographic apparatus and device manufacturing method |
Joost Jeroen Ottens, Marcus Boonman, Andre Bernardus Jeunink |
2009-07-21 |
| 7525638 |
Lithographic apparatus and device manufacturing method |
Erik Petrus Buurman, Johannes Wilhelmus Maria Cornelis Teeuwsen, Bearrach Moest, Mare Antonius Maria Haast |
2009-04-28 |
| 7397940 |
Object positioning method for a lithographic projection apparatus |
Marcus J. H. Willems van Dijk, Engelbertus A. F. van de Pasch, Andreas Ariens |
2008-07-08 |
| 7019815 |
Off-axis leveling in lithographic projection apparatus |
Johannes Christiaan Maria Jasper, Erik Roelof Loopstra, Theodorus Marinus Modderman, Gerrit Johannes Nijmeijer, Nicolaas Antonius Allegondus Johannes Van Asten +5 more |
2006-03-28 |
| 7012672 |
Lithographic apparatus, system, method, computer program, and apparatus for height map analysis |
Tasja Van Rhee, Willem Herman Gertruda Anna Koenen, Alex Van Zon, Michael Broers |
2006-03-14 |
| 6894261 |
Position measuring system for use in lithographic apparatus |
Andreas Ariens, Martinus Hendricus Hoeks, Patrick David Vogelsang, Erik Roelof Loopstra, YimBun P. Kwan |
2005-05-17 |
| 6875992 |
Position measuring device, position measuring system, lithographic apparatus, and device manufacturing method |
Andreas Ariens, Martinus Hendricus Hoeks, Patrick David Vogelsang, Erik Roelof Loopstra, YimBun P. Kwan |
2005-04-05 |
| 6856376 |
Lithographic apparatus, apparatus cleaning method, device manufacturing method and device manufactured thereby |
Gert-Jan Heerens, Sjoerd Nicolaas Lambertus Donders, Franciscus Andreas Cornelis Johannes Spanjers, Aschwin Lodewijk Hendricus Johannes Van Meer |
2005-02-15 |
| 6674510 |
Off-axis levelling in lithographic projection apparatus |
Johannes Christiaan Maria Jasper, Erik Roelof Loopstra, Theodorus Marinus Modderman, Gerrit Johannes Nijmeijer, Nicolaas Antonius Allegondus Johannes Van Asten +5 more |
2004-01-06 |
| 6563564 |
Method of operating an optical imaging system, lithographic projection apparatus, device manufacturing method, and device manufactured thereby |
Christianus Gerardus Maria De Mol, Marcel Van Dijk, Franciscus Antonius Chrysogonus Marie Commissaris, Simon De Groot, Catharina Johanna Lucia Maria van den Enden |
2003-05-13 |
| 6058281 |
Scan module for a document copying machine |
— |
2000-05-02 |