Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7626684 | Lithographic projection apparatus and a device manufacturing method using such lithographic projection apparatus | Andre Bernardus Jeunink, M'hamed Akhssay, Johannes Jacobus Matheus Baselmans, Simon De Groot, Wim Tjibbo Tel +3 more | 2009-12-01 |
| 7403264 | Lithographic projection apparatus and a device manufacturing method using such lithographic projection apparatus | Andre Bernardus Jeunink, M'hamed Akhssay, Johannes Jacobus Matheus Baselmans, Simon De Groot, Wim Tjibbo Tel +3 more | 2008-07-22 |
| 7262831 | Lithographic projection apparatus and device manufacturing method using such lithographic projection apparatus | M'hamed Akhssay, Johannes Jacobus Matheus Baselmans, Simon De Groot, Andre Bernardus Jeunink, Wim Tjibbo Tel +2 more | 2007-08-28 |
| 6563564 | Method of operating an optical imaging system, lithographic projection apparatus, device manufacturing method, and device manufactured thereby | Christianus Gerardus Maria De Mol, Thomas Josephus Maria Castenmiller, Marcel Van Dijk, Simon De Groot, Catharina Johanna Lucia Maria van den Enden | 2003-05-13 |