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Methods and apparatus for measuring a property of a substrate |
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Lithographic apparatus and device manufacturing method involving a heater |
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2022-07-05 |
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Methods and apparatus for measuring a property of a substrate |
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2021-05-04 |
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Lithographic apparatus and device manufacturing method involving a heater |
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2020-11-17 |
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Methods and apparatus for measuring a property of a substrate |
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2020-08-18 |
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Methods and apparatus for measuring a property of a substrate |
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2019-06-11 |
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Lithographic apparatus and device manufacturing method involving a heater |
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2019-04-09 |
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Methods and apparatus for measuring a property of a substrate |
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2017-03-14 |
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2016-02-23 |
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Lithographic apparatus and device manufacturing method involving a heater |
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2015-11-17 |
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Optimization method and a lithographic cell |
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2013-12-17 |
| 7916275 |
Methods of characterizing similarity or consistency in a set of entities |
Maria Elisabeth Reuhman-Huisken |
2011-03-29 |
| 7889318 |
Methods of characterizing similarity between measurements on entities, computer programs product and data carrier |
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2011-02-15 |
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Method of characterization, method of characterizing a process operation, and device manufacturing method |
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2010-01-19 |
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2009-01-20 |
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Method of characterization, method of characterizing a process operation, and device manufacturing method |
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2008-08-12 |
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Method of operating an optical imaging system, lithographic projection apparatus, device manufacturing method, and device manufactured thereby |
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2003-05-13 |