Issued Patents All Time
Showing 1–25 of 49 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12197120 | Patterning device and method of use thereof | Marie-Claire VAN LARE, Frank Jan TIMMERMANS, Friso Wittebrood, John Martin McNamara | 2025-01-14 |
| 10775705 | Patterning stack optimization | Wim Tjibbo Tel, Orion Jonathan Pierre Mouraille, Anton Bernhard Van Oosten | 2020-09-15 |
| 10732498 | Patterning device | Pieter Cristiaan DE GROOT, Gerard Frans Jozef Schasfoort, Maksym SLADKOV, Manfred Petrus Johannes Maria DIKKERS, Pieter-Jan Van Zwol +6 more | 2020-08-04 |
| 10551736 | Methods for providing lithography features on a substrate by self-assembly of block copolymers | Tamara Druzhinina, Emiel Peeters, Sander Frederik Wuister, Christianus Martinus Van Heesch, Eddy Cornelis Antonius Van Der Heijden +1 more | 2020-02-04 |
| 10401723 | Patterning device | Pieter Cristiaan DE GROOT, Gerard Frans Jozef Schasfoort, Maksym SLADKOV, Manfred Petrus Johannes Maria DIKKERS, Pieter-Jan Van Zwol +6 more | 2019-09-03 |
| 10331042 | Method for a lithographic apparatus | Laurentius Cornelius De Winter | 2019-06-25 |
| 10240250 | Method to provide a patterned orientation template for a self-assemblable polymer | Thanh Trung Nguyen, Wilhelmus Sebastianus Marcus Maria Ketelaars, Sander Frederik Wuister, Eddy Cornelis Antonius Van Der Heijden, Hieronymus Johannus Christiaan Meessen +7 more | 2019-03-26 |
| 9811002 | Determination and application of non-monotonic dose sensitivity | — | 2017-11-07 |
| 9535341 | Method for a lithographic apparatus | Laurentius Cornelius De Winter | 2017-01-03 |
| 9513109 | Lithographic mask, lithographic apparatus and method | — | 2016-12-06 |
| 9513553 | Methods of providing patterned epitaxy templates for self-assemblable block copolymers for use in device lithography | Sander Frederik Wuister, Vadim Yevgenyevich Banine, Roelof Koole, Emiel Peeters, Harmeet Singh | 2016-12-06 |
| 9285685 | Lithographic apparatus and device manufacturing method | Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Adrianus Franciscus Petrus Engelen, Paul Graupner, Johannes Catharinus Hubertus Mulkens +1 more | 2016-03-15 |
| 9229324 | Methods of providing patterned templates for self-assemblable block copolymers for use in device lithography | Harmeet Singh, Vadim Yevgenyevich Banine, Sander Frederik Wuister, Roelof Koole, Emiel Peeters | 2016-01-05 |
| 9229336 | Lithographic apparatus and methods for determining an improved configuration of a lithographic apparatus | Bernardo Kastrup, Sander De Putter | 2016-01-05 |
| 9170502 | Method of optimizing a lithographic process, device manufacturing method, lithographic apparatus, computer program product and simulation apparatus | — | 2015-10-27 |
| 8974989 | Lithographic mask, lithographic apparatus and method | — | 2015-03-10 |
| 8786833 | Lithographic method and arrangement for manufacturing a spacer | Pioter Nikolsky, Remco Jochem Sebastiaan Groenendijk | 2014-07-22 |
| 8780325 | Method for a lithographic apparatus | Luis Alberto Colina Santamaria, Laurentius Cornelius De Winter | 2014-07-15 |
| 8711330 | Lithographic apparatus and device manufacturing method | Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Adrianus Franciscus Petrus Engelen, Paul Graeupner, Johannes Catharinus Hubertus Mulkens +1 more | 2014-04-29 |
| 8612045 | Optimization method and a lithographic cell | Everhardus Cornelis Mos, Mircea Dusa, Christianus Gerardus Maria De Mol, Scott Anderson Middlebrooks, Dongzi Wangli | 2013-12-17 |
| 8426088 | Method for a lithographic apparatus | Laurentius Cornelius De Winter | 2013-04-23 |
| 8416394 | Lithographic apparatus and device manufacturing method | — | 2013-04-09 |
| 8300212 | Device manufacturing method and lithographic apparatus | Laurentius Cornelius De Winter | 2012-10-30 |
| RE43643 | Lithographic manufacturing process, lithographic projection apparatus, and device manufactured thereby | — | 2012-09-11 |
| 8178263 | Method for a lithographic apparatus | Laurentius Cornelius De Winter | 2012-05-15 |