Issued Patents All Time
Showing 26–49 of 49 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8164741 | Lithographic apparatus and device manufacturing method | — | 2012-04-24 |
| 8142964 | Method of designing sets of mask patterns, sets of mask patterns, and device manufacturing method | Sander De Putter, Bertus Johan Vleeming | 2012-03-27 |
| 7982856 | Lithographic apparatus and device manufacturing method | — | 2011-07-19 |
| 7961293 | Lithographic apparatus and device manufacturing method | Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Adrianus Franciscus Petrus Engelen, Paul Graeupner, Johannes Catharinus Hubertus Mulkens +1 more | 2011-06-14 |
| 7961296 | Lithographic apparatus and device manufacturing method | — | 2011-06-14 |
| 7824842 | Method of patterning a positive tone resist layer overlaying a lithographic substrate | — | 2010-11-02 |
| 7811746 | Method of patterning a positive tone resist layer overlaying a lithographic substrate | — | 2010-10-12 |
| 7732110 | Method for exposing a substrate and lithographic projection apparatus | Judocus Marie Dominicus Stoeldraijer, Johannes Wilhelmus De Klerk | 2010-06-08 |
| 7670731 | Method for exposing a substrate and lithographic projection apparatus | Johannes Anna Quaedackers, Judocus Marie Dominicus Stoeldraijer, Johannes Wilhelmus De Klerk, Alexander Serebryakov | 2010-03-02 |
| 7655368 | Method for exposing a substrate and lithographic projection apparatus | Judocus Marie Dominicus Stoeldraijer, Johannes Wilhelmus De Klerk | 2010-02-02 |
| 7491478 | Lithographic apparatus and device manufacturing method | Erik Petrus Buurman, Alexander Straaijer, J. W. De Klerk | 2009-02-17 |
| 7471375 | Correction of optical proximity effects by intensity modulation of an illumination arrangement | Luis Alberto Colina Santamaria Colina, Steven George Hansen | 2008-12-30 |
| 7466413 | Marker structure, mask pattern, alignment method and lithographic method and apparatus | Mircea Dusa, Richard Johannes Franciscus Van Haren, Luis Alberto Colina Santamaria Colina, Eric Henri Jan Hendrickx, Geert Vandenberghe +1 more | 2008-12-16 |
| 7456931 | Device manufacturing method, computer program product and lithographic apparatus | Laurentius Cornelius De Winter, Maria Johanna Agnes Rubingh | 2008-11-25 |
| 7425397 | Method of determining an illumination profile and device manufacturing method | Armand Eugene Albert Koolen | 2008-09-16 |
| 7359029 | Lithographic apparatus and method of reducing thermal distortion | Erik Roelof Loopstra | 2008-04-15 |
| 7352435 | Lithographic apparatus and device manufacturing method | Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Adrianus Franciscus Petrus Engelen, Paul Graeupner, Johannes Catharinus Hubertus Mulkens +1 more | 2008-04-01 |
| 7316870 | Device manufacturing method, mask set for use in the method, data set for controlling a programmable patterning device, method of generating a mask pattern and a computer program | Markus Franciscus Antonius Eurlings | 2008-01-08 |
| 7307690 | Device manufacturing method, computer program product and lithographic apparatus | Laurentius Cornelius De Winter, Maria Johanna Agnes Rubingh | 2007-12-11 |
| 7256873 | Enhanced lithographic resolution through double exposure | Donis Flagello, Steven George Hansen | 2007-08-14 |
| 7256870 | Method and apparatus for controlling iso-dense bias in lithography | — | 2007-08-14 |
| 6977714 | Lithographic manufacturing process, lithographic projection apparatus, and device manufactured thereby | — | 2005-12-20 |
| 6809797 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Johannes Jacobus Matheus Baselmans, Adrianus Franciscus Petrus Engelen, Hugo Augustinus Joseph Cramer, Carsten Kohler | 2004-10-26 |
| 6795163 | Lithographic manufacturing process, lithographic projection apparatus, and device manufactured thereby | — | 2004-09-21 |