Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9146477 | Lithographic apparatus and method of modifying a beam of radiation within a lithographic apparatus | Bastiaan Stephanus Hendricus Jansen | 2015-09-29 |
| 7724351 | Lithographic apparatus, device manufacturing method and exchangeable optical element | Erik Roelof Loopstra, Adrianus Franciscus Petrus Engelen, Bernardus Antonius Johannes Luttikhuis, Johannes Martinus Andreas Hazenberg, Laurentius Catrinus Jorritsma +7 more | 2010-05-25 |
| 7456931 | Device manufacturing method, computer program product and lithographic apparatus | Laurentius Cornelius De Winter, Jozef Maria Finders | 2008-11-25 |
| 7307690 | Device manufacturing method, computer program product and lithographic apparatus | Laurentius Cornelius De Winter, Jozef Maria Finders | 2007-12-11 |
| 6825914 | System for flushing at least one internal space of an objective | Joachim Schroeder, Gerald Richter, Dieter Schmerek, Uwe Schubert, Willem Van Schaik +1 more | 2004-11-30 |