Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8435726 | Method of processing an optical element and an optical element, in particular for a microlithographic projection exposure apparatus | Alexandra Pazidis, Christoph Zaczek, Alexander Hirnet, Herbert Fink | 2013-05-07 |
| 8068279 | Optical system of an illumination device of a projection exposure apparatus | Karl-Heinz Schuster, Juergen Hartmaier, Manfred Maul, Detlev Mueller, Otto Hahnemann +3 more | 2011-11-29 |
| 7545483 | Optical element unit for exposure processes | Bernhard Gellrich, Jens Kugler, Thomas Schletterer, Guido Limbach, Julian Kaller +2 more | 2009-06-09 |
| 6825914 | System for flushing at least one internal space of an objective | Joachim Schroeder, Gerald Richter, Uwe Schubert, Maria Johanna Agnes Rubingh, Willem Van Schaik +1 more | 2004-11-30 |