Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11095134 | Method of producing a modular battery storage system, modular battery storage system, and battery management system therefor | Martin Elmer, Dieter Kloos | 2021-08-17 |
| 8435726 | Method of processing an optical element and an optical element, in particular for a microlithographic projection exposure apparatus | Alexandra Pazidis, Christoph Zaczek, Herbert Fink, Dieter Schmerek | 2013-05-07 |
| 7489441 | Monocrystalline optical component with curved surface and multilayer coating | Patrick Scheible, Harald Schink | 2009-02-10 |
| 7460206 | Projection objective for immersion lithography | Patrick Scheible, Alexandra Pazidis, Karl-Heinz Schuster, Christoph Zaczek, Michael Lill +5 more | 2008-12-02 |