Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7489441 | Monocrystalline optical component with curved surface and multilayer coating | Patrick Scheible, Alexander Hirnet | 2009-02-10 |
| 7460206 | Projection objective for immersion lithography | Patrick Scheible, Alexander Hirnet, Alexandra Pazidis, Karl-Heinz Schuster, Christoph Zaczek +5 more | 2008-12-02 |