Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8605257 | Projection system with compensation of intensity variations and compensation element therefor | Alexandra Pazidis, Reiner Garreis, Michael Totzeck, Heiko Feldmann, Paul Graeupner +2 more | 2013-12-10 |
| 7489441 | Monocrystalline optical component with curved surface and multilayer coating | Alexander Hirnet, Harald Schink | 2009-02-10 |
| 7460206 | Projection objective for immersion lithography | Alexander Hirnet, Alexandra Pazidis, Karl-Heinz Schuster, Christoph Zaczek, Michael Lill +5 more | 2008-12-02 |
| 7093937 | Optical component and coating system for coating substrates for optical components | Harry J. Bauer, Matthias Heller, Hans-Jochen Paul, Jens Ullmann, Christoph Zaczek | 2006-08-22 |
| 6863398 | Method and coating system for coating substrates for optical components | Harry J. Bauer, Matthias Heller, Hans-Jochen Paul, Jens Ullmann, Christoph Zaczek | 2005-03-08 |