Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8605257 | Projection system with compensation of intensity variations and compensation element therefor | Patrick Scheible, Alexandra Pazidis, Michael Totzeck, Heiko Feldmann, Paul Graeupner +2 more | 2013-12-10 |
| 7310187 | Projection objective, especially for microlithography, and method for adjusting a projection objective | Alexander Epple, Paul Graeupner, Winfried Kaiser, Wilhelm Ulrich | 2007-12-18 |
| 7209292 | Projection objective, especially for microlithography, and method for adjusting a projection objective | Alexander Epple, Paul Graeupner, Winfried Kaiser, Wilhelm Ulrich | 2007-04-24 |
| 7079331 | Device for holding a beam splitter element | Ulrich Weber, Alexander Kohl, Hubert Holderer, Armin Schoeppach, Erwin Gaber +5 more | 2006-07-18 |
| 6806942 | Projection exposure system | Karl-Heinz Schuster, Wilhelm Ulrich, Toralf Gruner, Daniel Kraehmer, Wolfgang Singer +2 more | 2004-10-19 |