Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11474281 | Optical element and method of making an optical element | Christian Beder, Christoph Zaczek, Diana Tonova, Michael Sundermann | 2022-10-18 |
| 10698135 | Optical element and method of making an optical element | Christian Beder, Christoph Zaczek, Diana Tonova, Michael Sundermann | 2020-06-30 |
| 7079331 | Device for holding a beam splitter element | Ulrich Weber, Alexander Kohl, Hubert Holderer, Armin Schoeppach, Winfried Kaiser +5 more | 2006-07-18 |
| 6593998 | Projection exposure system | Toralf Gruner, Rudolf Von Bünau | 2003-07-15 |
| 6388823 | Optical system, especially a projection light facility for microlithography | Christian Wagner, Hubert Holderer, Michael Gerhard, Erich Merz, Jochen Becker +1 more | 2002-05-14 |