Issued Patents All Time
Showing 1–25 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9891535 | Optical projection system | Johannes Rau, Bernhard Gellrich, Jens Kugler, Martin Mahlmann, Bernhard Geuppert +2 more | 2018-02-13 |
| 9798243 | Optical device having a deformable optical element | Manfred Steinbach | 2017-10-24 |
| 9766550 | Actuators and microlithography projection exposure systems and methods using the same | Ulrich Weber, Stefan Hembacher | 2017-09-19 |
| 9604299 | Method and device for connecting an optical element to a frame | Johnannes Rau, Gennady Fedosenko, Leonid Gorkhover, Gerd Klose, Stefan Wiesner +5 more | 2017-03-28 |
| 9557653 | Optical projection system | Johannes Rau, Bernhard Gellrich, Jens Kugler, Martin Mahlmann, Bernhard Geuppert +2 more | 2017-01-31 |
| 9513562 | Projection exposure apparatus for microlithography for the production of semiconductor components | Juergen Fischer, Matthias Orth, Norbert Muehlberger, Thorsten Rassel, Armin Werber +1 more | 2016-12-06 |
| 9436101 | Optical arrangement and microlithographic projection exposure apparatus including same | Hans-Juergen Mann, Frank Eisert, Yim-Bun Patrick Kwan | 2016-09-06 |
| 9341807 | Gravitation compensation for optical elements in projection exposure apparatuses | Norbert Muehlberger, Thorsten Rassel, Juergen Fischer, Matthias Orth | 2016-05-17 |
| 9217936 | Optical device having a deformable optical element | Manfred Steinbach | 2015-12-22 |
| 9195145 | Microlithographic imaging optical system including multiple mirrors | Hans-Juergen Mann, Johannes Zellner | 2015-11-24 |
| 9175948 | Optical module with a measuring device | Stefan Hembacher, Guido Limbach, Jens Kugler | 2015-11-03 |
| 9104016 | Optical projection system | Johannes Rau, Bernhard Gellrich, Jens Kugler, Martin Mahlmann, Bernhard Geuppert +2 more | 2015-08-11 |
| 8885143 | Projection exposure apparatus for microlithography for the production of semiconductor components | Juergen Fischer, Matthias Orth, Norbert Muehlberger, Thorsten Rassel, Armin Werber +1 more | 2014-11-11 |
| 8873122 | Microlithographic imaging optical system including multiple mirrors | Hans-Juergen Mann, Johannes Zellner | 2014-10-28 |
| 8854602 | Holding device for an optical element in an objective | Bernhard Gellrich, Andreas Wurmbrand, Jens Kugler, Christian Zengerling, Stephane Bruynooghe | 2014-10-07 |
| 8854603 | Gravitation compensation for optical elements in projection exposure apparatuses | Norbert Muehlberger, Thorsten Rassel, Juergen Fischer, Matthias Orth | 2014-10-07 |
| 8705185 | Optical element | Johannes Rau, Bernhard Geuppert | 2014-04-22 |
| 8705006 | Method and device for connecting an optical element to a frame | Johannes Rau, Gennady Fedosenko, Leonid Gorkhover, Gerd Klose, Stefan Wiesner +5 more | 2014-04-22 |
| 8659745 | Optical system with an exchangeable, manipulable correction arrangement for reducing image aberrations | Guido Limbach, Franz Sorg, Ulrich Weber, Ulrich Loering, Dirk Hellweg +7 more | 2014-02-25 |
| 8542346 | Optical system with an exchangeable, manipulable correction arrangement for reducing image aberrations | Guido Limbach, Franz Sorg, Ulrich Weber, Ulrich Loering, Dirk Hellweg +7 more | 2013-09-24 |
| 8508868 | Holding arrangement for an optical element | Ulrich Weber, Hubert Holderer | 2013-08-13 |
| 8456615 | Optical system having heat dissipation arrangement | Hubert Holderer, Johannes Lippert | 2013-06-04 |
| 8339569 | Temperature-control device for an optical assembly | Timo Laufer | 2012-12-25 |
| 8300210 | Optical projection system | Johannes Rau, Bernhard Gellrich, Jens Kugler, Martin Mahlmann, Bernhard Geuppert +2 more | 2012-10-30 |
| 7920344 | Arrangement for mounting an optical element | Christian Zenger/Ling | 2011-04-05 |