Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9996015 | Mirror module, in particular for a microlithographic projection exposure appararatus | Jens Prochnau, Dirk Schaffer, Bernhard Gellrich, Markus Kern | 2018-06-12 |
| 9298111 | Optical arrangement in a projection exposure apparatus for EUV lithography | Viktor Kulitzki, Bernhard Gellrich, Stefan Xalter, Yim-Bun Patrick Kwan, Peter Deufel | 2016-03-29 |
| 9182679 | Lithographic apparatus and device manufacturing method | Christiaan Alexander Hoogendam, Erik Roelof Loopstra, Bob Streefkerk, Bernhard Gellrich | 2015-11-10 |
| 9081296 | Replacement apparatus for an optical element | Jens Kugler, Franz Sorg, Thomas Schletterer, Thomas Ittner | 2015-07-14 |
| 8902519 | Replacement apparatus for an optical element | Jens Kugler, Franz Sorg, Thomas Schletterer, Thomas Ittner | 2014-12-02 |
| 8860922 | Lithographic apparatus and device manufacturing method | Christiaan Alexander Hoogendam, Erik Roelof Loopstra, Bob Streefkerk, Bernhard Gellrich | 2014-10-14 |
| 8854602 | Holding device for an optical element in an objective | Bernhard Gellrich, Jens Kugler, Armin Schoeppach, Christian Zengerling, Stephane Bruynooghe | 2014-10-07 |
| 8810771 | Lithographic apparatus and device manufacturing method | Christiaan Alexander Hoogendam, Erik Roelof Loopstra, Bob Streefkerk, Bernhard Gellrich | 2014-08-19 |
| 8582081 | Device for the low-deformation replaceable mounting of an optical element | Franz Sorg, Thomas Petasch, Dirk Schaffer, Siegfried Wahl | 2013-11-12 |
| 8488261 | Replacement apparatus for an optical element | Jens Kugler, Franz Sorg, Thomas Schletterer, Thomas Ittner | 2013-07-16 |
| 8339576 | Projection objective of a microlithographic projection exposure apparatus | Ulrich Loering, Vladimir Kamenov, Dirk Heinrich Ehm, Stefan Schmidt, Moritz Becker | 2012-12-25 |
| 8102502 | Lithographic apparatus and device manufacturing method | Christiaan Alexander Hoogendam, Erik Roelof Loopstra, Bob Streefkerk, Bernhard Gellrich | 2012-01-24 |
| 7995296 | Replacement apparatus for an optical element | Jens Kugler, Franz Sorg, Thomas Schletterer, Thomas Ittner | 2011-08-09 |
| 7768723 | Replacement apparatus for an optical element | Jens Kugler, Franz Sorg, Thomas Schletterer, Thomas Ittner | 2010-08-03 |
| 7649702 | Immersion lithography objective | Bernhard Gellrich, Paul Graeupner, Juergen Fischer, Bauke Jansen, Bob Streefkerk +2 more | 2010-01-19 |
| 7570343 | Microlithographic projection exposure apparatus | Aurelian Dodoc, Karl-Heinz Schuster, Joerg Mallmann, Wilhelm Ulrich, Hans-Juergen Rostalski +6 more | 2009-08-04 |
| 7532304 | Lithographic apparatus and device manufacturing method | Christiaan Alexander Hoogendam, Erik Roelof Loopstra, Bob Streefkerk, Bernard Gellrich | 2009-05-12 |
| 7515363 | Replacement apparatus for an optical element | Jens Kugler, Franz Sorg, Thomas Schletterer, Thomas Ittner | 2009-04-07 |
| 7471469 | Device for the low-deformation replaceable mounting of an optical element | Franz Sorg, Thomas Petasch, Dirk Schaffer, Siegfried Wahl | 2008-12-30 |
| 7352433 | Lithographic apparatus and device manufacturing method | Christiaan Alexander Hoogendam, Erik Roelof Loopstra, Bob Streefkerk, Bernard Gellrich | 2008-04-01 |
| 7265917 | Replacement apparatus for an optical element | Jens Kugler, Franz Sorg, Thomas Schletterer, Thomas Ittner | 2007-09-04 |
| 7085080 | Low-deformation support device of an optical element | Dirk Schaffer, Thomas Schletterer | 2006-08-01 |