Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10809636 | Optical arrangement, in particular lithography system | Bernhard Gellrich, Ralf Zweering, Charles Seviour, Michael Erath, Jens Prochnau +3 more | 2020-10-20 |
| 10761436 | Optical arrangement, in particular lithography system, with a transport lock | Ralf Zweering, Steffen Fritzsche, Hendrik Wagner, Florian Ahles, Jens Prochnau +2 more | 2020-09-01 |
| 10571813 | Connection arrangement for a force-fit connection between ceramic components | Karsten Siegmanski, Peter Deufel, Stefan Xalter, Bernhard Gellrich | 2020-02-25 |
| 9298111 | Optical arrangement in a projection exposure apparatus for EUV lithography | Bernhard Gellrich, Stefan Xalter, Yim-Bun Patrick Kwan, Peter Deufel, Andreas Wurmbrand | 2016-03-29 |