Issued Patents All Time
Showing 1–25 of 54 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11281114 | Projection exposure apparatus for semiconductor lithography | Jens Kugler, Mark Feygin, Stefan Xalter, Stefan Hembacher | 2022-03-22 |
| 10809636 | Optical arrangement, in particular lithography system | Ralf Zweering, Charles Seviour, Michael Erath, Jens Prochnau, Marwene Nefzi +3 more | 2020-10-20 |
| 10754132 | Imaging optical system for microlithography | Olaf Rogalsky, Sonja Schneider, Boris Bittner, Jens Kugler, Rolf Freimann | 2020-08-25 |
| 10571813 | Connection arrangement for a force-fit connection between ceramic components | Karsten Siegmanski, Peter Deufel, Viktor Kulitzki, Stefan Xalter | 2020-02-25 |
| 10203607 | Optical element unit for exposure processes | Tilman Schwertner, Ulrich Bingel, Guido Limbach, Julian Kaller, Hans-Juergen Scherle +2 more | 2019-02-12 |
| 9996015 | Mirror module, in particular for a microlithographic projection exposure appararatus | Jens Prochnau, Dirk Schaffer, Andreas Wurmbrand, Markus Kern | 2018-06-12 |
| 9891535 | Optical projection system | Johannes Rau, Armin Schoeppach, Jens Kugler, Martin Mahlmann, Bernhard Geuppert +2 more | 2018-02-13 |
| 9817322 | Optical imaging device and method for reducing dynamic fluctuations in pressure difference | Stefan Hembacher, Jens Kugler, Sascha Bleidistel | 2017-11-14 |
| 9810996 | Optical imaging device with thermal attenuation | Jens Kugler, Thomas Ittner, Stefan Hembacher, Karl-Heinz Schimitzek, Payam Tayebati +1 more | 2017-11-07 |
| 9557653 | Optical projection system | Johannes Rau, Armin Schoeppach, Jens Kugler, Martin Mahlmann, Bernhard Geuppert +2 more | 2017-01-31 |
| 9298111 | Optical arrangement in a projection exposure apparatus for EUV lithography | Viktor Kulitzki, Stefan Xalter, Yim-Bun Patrick Kwan, Peter Deufel, Andreas Wurmbrand | 2016-03-29 |
| 9182679 | Lithographic apparatus and device manufacturing method | Christiaan Alexander Hoogendam, Erik Roelof Loopstra, Bob Streefkerk, Andreas Wurmbrand | 2015-11-10 |
| 9104016 | Optical projection system | Johannes Rau, Armin Schoeppach, Jens Kugler, Martin Mahlmann, Bernhard Geuppert +2 more | 2015-08-11 |
| 9046795 | Optical element unit for exposure processes having sealing element | Tilman Schwertner, Ulrich Bingel, Guido Limbach, Julian Kaller, Hans-Juergen Scherle +2 more | 2015-06-02 |
| 8902401 | Optical imaging device with thermal attenuation | Jens Kugler, Thomas Ittner, Stefan Hembacher, Karl-Heinz Schimitzek, Payam Tayebati +1 more | 2014-12-02 |
| 8860922 | Lithographic apparatus and device manufacturing method | Christiaan Alexander Hoogendam, Erik Roelof Loopstra, Bob Streefkerk, Andreas Wurmbrand | 2014-10-14 |
| 8854602 | Holding device for an optical element in an objective | Andreas Wurmbrand, Jens Kugler, Armin Schoeppach, Christian Zengerling, Stephane Bruynooghe | 2014-10-07 |
| 8810771 | Lithographic apparatus and device manufacturing method | Christiaan Alexander Hoogendam, Erik Roelof Loopstra, Bob Streefkerk, Andreas Wurmbrand | 2014-08-19 |
| 8659745 | Optical system with an exchangeable, manipulable correction arrangement for reducing image aberrations | Guido Limbach, Franz Sorg, Armin Schoeppach, Ulrich Weber, Ulrich Loering +7 more | 2014-02-25 |
| 8542346 | Optical system with an exchangeable, manipulable correction arrangement for reducing image aberrations | Guido Limbach, Franz Sorg, Armin Schoeppach, Ulrich Weber, Ulrich Loering +7 more | 2013-09-24 |
| 8456616 | Optical system for microlithography | Daniel Kraehmer, Wilhelm Ulrich, Matthias Manger | 2013-06-04 |
| 8363206 | Optical imaging device with thermal attenuation | Jens Kugler, Thomas Ittner, Stefan Hembacher, Karl-Heinz Schimitzek, Payam Tayebati +1 more | 2013-01-29 |
| 8300210 | Optical projection system | Johannes Rau, Armin Schoeppach, Jens Kugler, Martin Mahlmann, Bernhard Geuppert +2 more | 2012-10-30 |
| 8279402 | Optical arrangement for immersion lithography with a hydrophobic coating, as well as projection exposure apparatus comprising the same | Stephan Six, Michael Lill, Ruediger Duesing, Michael Widmann, Andreas Schubert +2 more | 2012-10-02 |
| 8102502 | Lithographic apparatus and device manufacturing method | Christiaan Alexander Hoogendam, Erik Roelof Loopstra, Bob Streefkerk, Andreas Wurmbrand | 2012-01-24 |