Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11372334 | Method for producing a reflective optical element, reflective optical element, and use of a reflective optical element | Markus Bauer, Willi Anderl | 2022-06-28 |
| 10534269 | Method for producing a reflective optical element, reflective optical element, and use of a reflective optical element | Markus Bauer, Willi Anderl | 2020-01-14 |
| 10203607 | Optical element unit for exposure processes | Tilman Schwertner, Guido Limbach, Julian Kaller, Hans-Juergen Scherle, Jens Kugler +2 more | 2019-02-12 |
| 9604299 | Method and device for connecting an optical element to a frame | Armin Schoeppach, Johnannes Rau, Gennady Fedosenko, Leonid Gorkhover, Gerd Klose +5 more | 2017-03-28 |
| 9482959 | EUV microlithography illumination optical system and EUV attenuator for same | Nicolas Schmidts, Joachim Hartjes, Boaz Pnini-Mittler | 2016-11-01 |
| 9046795 | Optical element unit for exposure processes having sealing element | Tilman Schwertner, Guido Limbach, Julian Kaller, Hans-Juergen Scherle, Jens Kugler +2 more | 2015-06-02 |
| 8705006 | Method and device for connecting an optical element to a frame | Armin Schoeppach, Johannes Rau, Gennady Fedosenko, Leonid Gorkhover, Gerd Klose +5 more | 2014-04-22 |
| 8441747 | Optical module with minimized overrun of the optical element | Willi Heintel, Hagen Federau, Joachim Hartjes, Harald Kirchner, Bernhard Geuppert +1 more | 2013-05-14 |
| 7965456 | Optical component having an improved transient thermal behavior and method for improving the transient thermal behavior of an optical component | Wilhelm Egle, Wolfgang Hafner, Willi Anderl, Holger Muenz, Thomas Neidhardt | 2011-06-21 |
| 7483223 | Optical component having an improved transient thermal behavior and method for improving the transient thermal behavior of an optical component | Wilhelm Egle, Wolfgang Hafner, Willi Anderl, Holger Muenz, Thomas Neidhardt | 2009-01-27 |
| 7034998 | Method of connecting a multiplicity of optical elements to a basic body | Frank Melzer | 2006-04-25 |
| 6824277 | Optical beam guidance system and method for preventing contamination of optical components contained therein | Ansgar Freitag, Josef Distl, Uwe Hamm | 2004-11-30 |
| 6503383 | Galvanoplastic optical mounting | Hubert Holderer, Frits Zernike | 2003-01-07 |
| 6166868 | Galvanoplastic optical mounting | Hubert Holderer, Frits Zernike | 2000-12-26 |