Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12353137 | Field facet system and lithography apparatus | Arno Schmittner, Stefan Lippoldt, Joram Rosseels, Rob Janssen | 2025-07-08 |
| 11789367 | Facet mirror for an illumination optical unit of a projection exposure apparatus | Christian Körner, Hubert Holderer, Markus Holz, Manuel Stompe, Stefan Seitz | 2023-10-17 |
| 11372334 | Method for producing a reflective optical element, reflective optical element, and use of a reflective optical element | Markus Bauer, Ulrich Bingel | 2022-06-28 |
| 10969699 | Projection lighting system for semiconductor lithography with an improved heat transfer | Ulrich Weber | 2021-04-06 |
| 10777958 | Beam reverser module and optical power amplifier having such a beam reverser module | Michael Schall, Johannes Kraus, Holger Muenz, Ingrid Schuster, Ulrich Weber +3 more | 2020-09-15 |
| 10534269 | Method for producing a reflective optical element, reflective optical element, and use of a reflective optical element | Markus Bauer, Ulrich Bingel | 2020-01-14 |
| 10303067 | Cooler for use in a device in a vacuum | Bernhard Weigl, Ann-Kathrin Wandner, Holger Kierey, Arno Schmittner, Markus Bauer +2 more | 2019-05-28 |
| 9843153 | Beam reverser module and optical power amplifier having such a beam reverser module | Michael Schall, Johannes Kraus, Holger Muenz, Ingrid Schuster, Ulrich Weber +3 more | 2017-12-12 |
| 8342701 | Reflective optical element for use in an EUV system | Holger Kierey, Michel Le Maire, Hubert Holderer, Anton Lengel | 2013-01-01 |
| 7965456 | Optical component having an improved transient thermal behavior and method for improving the transient thermal behavior of an optical component | Wilhelm Egle, Wolfgang Hafner, Ulrich Bingel, Holger Muenz, Thomas Neidhardt | 2011-06-21 |
| 7483223 | Optical component having an improved transient thermal behavior and method for improving the transient thermal behavior of an optical component | Wilhelm Egle, Wolfgang Hafner, Ulrich Bingel, Holger Muenz, Thomas Neidhardt | 2009-01-27 |