Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8342701 | Reflective optical element for use in an EUV system | Holger Kierey, Michel Le Maire, Willi Anderl, Hubert Holderer | 2013-01-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8342701 | Reflective optical element for use in an EUV system | Holger Kierey, Michel Le Maire, Willi Anderl, Hubert Holderer | 2013-01-01 |