Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11087955 | System combination of a particle beam system and a light-optical system with collinear beam guidance, and use of the system combination | Dirk Zeidler, Michael Schall, Joerg Jacobi | 2021-08-10 |
| 10777958 | Beam reverser module and optical power amplifier having such a beam reverser module | Michael Schall, Johannes Kraus, Holger Muenz, Ingrid Schuster, Willi Anderl +3 more | 2020-09-15 |
| 8342701 | Reflective optical element for use in an EUV system | Holger Kierey, Willi Anderl, Hubert Holderer, Anton Lengel | 2013-01-01 |
| 7944615 | Optical system and method for shaping a profile of a laser beam | Vitaliy Shklover, Holger Muenz, Christian Hoess | 2011-05-17 |
| 7629572 | Optical devices and related systems and methods | Vitaliy Shklover, Holger Kierey, Holger Muenz, Bernhard Weigl | 2009-12-08 |