Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12340973 | Particle beam system including a multi-beam deflection device and a beam stop, method for operating the particle beam system and associated computer program product | Stefan Schubert, Dieter Schumacher, Erik Essers, Ingo Mueller, Arne Thoma +2 more | 2025-06-24 |
| 12255040 | Multi-beam particle beam system and method for operating same | Dirk Zeidler, Christof Riedesel, Arne Thoma, Georgo Metalidis, Stefan Schubert +4 more | 2025-03-18 |
| 12249478 | Particle beam system for azimuthal deflection of individual particle beams and method for azimuth correction in a particle beam system | Hans Fritz, Andras G. Major, Dirk Zeidler, Arne Thoma | 2025-03-11 |
| 11562881 | Charged particle beam system | Dirk Zeidler, Stefan Schubert, Ingo Mueller, Mario Muetzel, Antonio Casares +1 more | 2023-01-24 |
| 11164715 | Charged particle beam system | Dirk Zeidler, Stefan Schubert, Ingo Mueller, Mario Muetzel, Antonio Casares +1 more | 2021-11-02 |
| 11087948 | Multi-beam charged particle system | Dirk Zeidler, Thomas Kemen, Christof Riedesel, Ralf Lenke | 2021-08-10 |
| 11087955 | System combination of a particle beam system and a light-optical system with collinear beam guidance, and use of the system combination | Dirk Zeidler, Michael Schall, Michel Le Maire | 2021-08-10 |
| 10811215 | Charged particle beam system | Dirk Zeidler, Stefan Schubert, Ingo Mueller, Mario Muetzel, Antonio Casares +1 more | 2020-10-20 |
| 10741355 | Multi-beam charged particle system | Dirk Zeidler, Thomas Kemen, Christof Riedesel, Ralf Lenke | 2020-08-11 |
| 9991089 | Particle beam system and method for operating a particle optical unit | Ingo Mueller, Nicole Rauwolf, Christof Riedesel, Thomas Kemen, Arne Thoma +4 more | 2018-06-05 |
| 9799485 | Particle beam system and method for operating a particle optical unit | Ingo Mueller, Nicole Bengesser, Christof Riedesel, Thomas Kemen, Arne Thoma +4 more | 2017-10-24 |