Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12255040 | Multi-beam particle beam system and method for operating same | Dirk Zeidler, Christof Riedesel, Arne Thoma, Joerg Jacobi, Stefan Schubert +4 more | 2025-03-18 |
| 12119204 | Particle beam system and the use thereof for flexibly setting the current intensity of individual particle beams | Stefan Schubert, Dirk Zeidler, Hans Fritz, Ralf Lenke | 2024-10-15 |
| 11562880 | Particle beam system for adjusting the current of individual particle beams | Dirk Zeidler, Hans Fritz, Ingo Mueller | 2023-01-24 |
| 10578974 | Optical element, in particular for a microlithographic projection exposure apparatus | Ralf Moser, Florian Herold, Arno Schmittner, Holger Kierey, Wolfgang Merkel | 2020-03-03 |
| 10503075 | EUV Collector | Ingrid Schuster, Wolfgang Merkel, Holger Kierey | 2019-12-10 |