Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10777958 | Beam reverser module and optical power amplifier having such a beam reverser module | Michael Schall, Johannes Kraus, Holger Muenz, Willi Anderl, Ulrich Weber +3 more | 2020-09-15 |
| 10503075 | EUV Collector | Wolfgang Merkel, Georgo Metalidis, Holger Kierey | 2019-12-10 |
| 9843153 | Beam reverser module and optical power amplifier having such a beam reverser module | Michael Schall, Johannes Kraus, Holger Muenz, Willi Anderl, Ulrich Weber +3 more | 2017-12-12 |