Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12111578 | Mirror for an illumination optical unit of a projection exposure apparatus comprising a spectral filter in the form of a grating structure and method for producing a spectral filter in the form of a grating structure on a mirror | Christof Jalics, Fabian Schuster, Andreas Sandner, Tobias Meisch | 2024-10-08 |
| 11231658 | Arrangement for an EUV lithography apparatus | Wolfgang Merkel | 2022-01-25 |
| 11099484 | Method for repairing reflective optical elements for EUV lithography | Robert Meier, Christof Jalics, Eric Eva, Ralf Winter, Arno Schmittner +4 more | 2021-08-24 |
| 10649340 | Reflective optical element for EUV lithography | Dirk Heinrich Ehm, Vitaliy Shklover, Irene Ament, Stefan Schmidt, Moritz Becker +6 more | 2020-05-12 |
| 10578972 | EUV collector for use in an EUV projection exposure apparatus | Johannes Zellner | 2020-03-03 |
| 10578974 | Optical element, in particular for a microlithographic projection exposure apparatus | Ralf Moser, Florian Herold, Arno Schmittner, Wolfgang Merkel, Georgo Metalidis | 2020-03-03 |
| 10503075 | EUV Collector | Ingrid Schuster, Wolfgang Merkel, Georgo Metalidis | 2019-12-10 |
| 10303067 | Cooler for use in a device in a vacuum | Willi Anderl, Bernhard Weigl, Ann-Kathrin Wandner, Arno Schmittner, Markus Bauer +2 more | 2019-05-28 |
| 9541685 | Method for producing a reflective optical component for an EUV projection exposure apparatus and component of this type | Heiko Siekmann, Andre Bresan | 2017-01-10 |
| 8342701 | Reflective optical element for use in an EUV system | Michel Le Maire, Willi Anderl, Hubert Holderer, Anton Lengel | 2013-01-01 |
| 7629572 | Optical devices and related systems and methods | Vitaliy Shklover, Holger Muenz, Michel Le Maire, Bernhard Weigl | 2009-12-08 |
| 7175773 | Method for manufacturing a blazed grating, such a blazed grating and a spectrometer having such a blazed grating | Klaus Heidemann, Bruno Nelles | 2007-02-13 |