Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12210289 | Mirror, in particular for a microlithographic projection exposure apparatus | Kerstin Hild, Toralf Gruner, Daniel Golde, Hans-Michael Stiepan | 2025-01-28 |
| 11982788 | Method for forming nanostructures on a surface and optical element | Alexandra Pazidis | 2024-05-14 |
| 11681236 | Method for in-situ dynamic protection of a surface and optical assembly | Jeffrey Erxmeyer | 2023-06-20 |
| 11525946 | Method for in situ protection of an aluminum layer and optical arrangement for the VUV wavelength range | — | 2022-12-13 |
| 11366395 | Mirror, in particular for a microlithographic projection exposure system | Kerstin Hild, Toralf Gruner | 2022-06-21 |
| 11328831 | Method for treating a reflective optical element for the EUV wavelength range, method for producing same, and treating apparatus | Christian Grasse, Martin Hermann, Stephan Six, Joern WEBER, Ralf Winter +3 more | 2022-05-10 |
| 11099484 | Method for repairing reflective optical elements for EUV lithography | Robert Meier, Holger Kierey, Christof Jalics, Eric Eva, Ralf Winter +4 more | 2021-08-24 |
| 11029515 | Optical element, and method for correcting the wavefront effect of an optical element | Kerstin Hild, Toralf Gruner | 2021-06-08 |
| 10649340 | Reflective optical element for EUV lithography | Dirk Heinrich Ehm, Irene Ament, Stefan Schmidt, Moritz Becker, Stefan Wiesner +6 more | 2020-05-12 |
| 10642167 | Optical element | Michael Schall, Johannes Kraus, Oliver Gloeckl, Jeffrey Erxmeyer, Horst Feldermann +2 more | 2020-05-05 |
| 10578783 | Optical grating and optical assembly for same | Sebastian Brueck, Michael Gerhard | 2020-03-03 |
| 9933711 | Optical element | Michael Schall, Johannes Kraus, Oliver Gloeckl, Jeffrey Erxmeyer, Horst Feldermann +2 more | 2018-04-03 |
| 9703209 | Reflective optical element for grazing incidence in the EUV wavelength range | — | 2017-07-11 |
| 7944615 | Optical system and method for shaping a profile of a laser beam | Holger Muenz, Michel Le Maire, Christian Hoess | 2011-05-17 |
| 7629572 | Optical devices and related systems and methods | Holger Kierey, Holger Muenz, Michel Le Maire, Bernhard Weigl | 2009-12-08 |
| 7471455 | Systems and methods for generating laser light shaped as a line beam | Palash P. Das, Albert Cefalo, David S. Knowles, Holger Muenz | 2008-12-30 |