Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406777 | Optical element for a EUV projection exposure system | Hartmut Enkisch, Sandro Hoffmann, Sebastian Strobel, Mirko Ribow, Christoph Nottbohm +2 more | 2025-09-02 |
| 11328831 | Method for treating a reflective optical element for the EUV wavelength range, method for producing same, and treating apparatus | Christian Grasse, Martin Hermann, Stephan Six, Ralf Winter, Oliver Dier +3 more | 2022-05-10 |
| 10061205 | Reflective optical element | Dirk Heinrich Ehm, Moritz Becker, Irene Ament, Gisela Von Blanckenhagen | 2018-08-28 |
| 9915873 | Reflective optical element, and optical system of a microlithographic projection exposure apparatus | Hartmut Enkisch, Hans-Jochen Paul, Thomas Schicketanz, Oliver Dier, Christian Grasse +2 more | 2018-03-13 |
| 9494718 | Mirror for the EUV wavelength range, substrate for such a mirror, projection objective for microlithography comprising such a mirror or such a substrate, and projection exposure apparatus for microlithography comprising such a projection objective | Stephan Muellender, Wilfried Clauss, Hans-Jochen Paul, Gerhard Braun, Sascha Migura +4 more | 2016-11-15 |
| 9453749 | Hybrid sensing ultrasonic flowmeter | David E. Bachmann, Rolf Schmitt, Markus Hantzsch, Andreas Weber | 2016-09-27 |
| 8937709 | Reflective optical element for EUV lithography | — | 2015-01-20 |
| 8928972 | Reflective optical element for EUV lithography | — | 2015-01-06 |