Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11328831 | Method for treating a reflective optical element for the EUV wavelength range, method for producing same, and treating apparatus | Martin Hermann, Stephan Six, Joern WEBER, Ralf Winter, Oliver Dier +3 more | 2022-05-10 |
| 9915873 | Reflective optical element, and optical system of a microlithographic projection exposure apparatus | Hartmut Enkisch, Hans-Jochen Paul, Thomas Schicketanz, Oliver Dier, Joern WEBER +2 more | 2018-03-13 |