Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11328831 | Method for treating a reflective optical element for the EUV wavelength range, method for producing same, and treating apparatus | Christian Grasse, Martin Hermann, Joern WEBER, Ralf Winter, Oliver Dier +3 more | 2022-05-10 |
| 11162778 | Method for determining material removal and device for the beam machining of a workpiece | Steffen Bezold | 2021-11-02 |
| 10107943 | Optical imaging with reduced immersion liquid evaporation effects | — | 2018-10-23 |
| 9733395 | Microlithographic projection exposure apparatus | Vladimir Kamenov, Daniel Kraehmer, Toralf Gruner, Karl-Stefan Weissenrieder, Heiko Feldmann +3 more | 2017-08-15 |
| 9645513 | Optical imaging with reduced immersion liquid evaporation effects | — | 2017-05-09 |
| 8934079 | Optical imaging with reduced immersion liquid evaporation effects | — | 2015-01-13 |
| 8564925 | Wafer chuck for EUV lithography | — | 2013-10-22 |
| 8279402 | Optical arrangement for immersion lithography with a hydrophobic coating, as well as projection exposure apparatus comprising the same | Michael Lill, Ruediger Duesing, Bernhard Gellrich, Michael Widmann, Andreas Schubert +2 more | 2012-10-02 |
| 8007711 | Method for operating a converter | Christian Imiela, Stephan Schulze, Christoph Sundermann, Joerg Hertel, Rolf Best | 2011-08-30 |
| 7738187 | Optical element, projection lens and associated projection exposure apparatus | Alexandra Pazidis, Ruediger Duesing, Gennady Fedosenko | 2010-06-15 |