Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8279402 | Optical arrangement for immersion lithography with a hydrophobic coating, as well as projection exposure apparatus comprising the same | Stephan Six, Michael Lill, Bernhard Gellrich, Michael Widmann, Andreas Schubert +2 more | 2012-10-02 |
| 7738187 | Optical element, projection lens and associated projection exposure apparatus | Alexandra Pazidis, Stephan Six, Gennady Fedosenko | 2010-06-15 |