Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9604299 | Method and device for connecting an optical element to a frame | Armin Schoeppach, Johnannes Rau, Gennady Fedosenko, Leonid Gorkhover, Gerd Klose +5 more | 2017-03-28 |
| 8705006 | Method and device for connecting an optical element to a frame | Armin Schoeppach, Johannes Rau, Gennady Fedosenko, Leonid Gorkhover, Gerd Klose +5 more | 2014-04-22 |
| 8279402 | Optical arrangement for immersion lithography with a hydrophobic coating, as well as projection exposure apparatus comprising the same | Stephan Six, Michael Lill, Ruediger Duesing, Bernhard Gellrich, Andreas Schubert +2 more | 2012-10-02 |