Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10113864 | Method for determining the registration of a structure on a photomask and apparatus to perform the method | Michael Arnz, Dirk Seidel | 2018-10-30 |
| 9604299 | Method and device for connecting an optical element to a frame | Armin Schoeppach, Johnannes Rau, Gennady Fedosenko, Leonid Gorkhover, Stefan Wiesner +5 more | 2017-03-28 |
| 9303975 | Method for determining the registration of a structure on a photomask and apparatus to perform the method | Michael Arnz, Dirk Seidel | 2016-04-05 |
| 9229209 | Autofocus device and autofocusing method for an imaging device | Michael Arnz, Mikhail Levtonov, Volkmar Betz | 2016-01-05 |
| 8736849 | Method and apparatus for measuring structures on photolithography masks | Ulrich Stroessner, Michael Totzeck | 2014-05-27 |
| 8705006 | Method and device for connecting an optical element to a frame | Armin Schoeppach, Johannes Rau, Gennady Fedosenko, Leonid Gorkhover, Stefan Wiesner +5 more | 2014-04-22 |
| 8473237 | Method for calibrating a specimen stage of a metrology system and metrology system comprising a specimen stage | Alexander Huebel, Matthias Manger, Uwe Schellhorn, Michael Arnz | 2013-06-25 |
| 8438804 | Wall leadthrough for leading a line through a building wall | Andreas Nowoczin | 2013-05-14 |
| 8369605 | Method and apparatus for determining the position of a structure on a carrier relative to a reference point of the carrier | Michael Arnz, Michael Totzeck | 2013-02-05 |
| 8260033 | Method and apparatus for determining the relative overlay shift of stacked layers | Michael Arnz | 2012-09-04 |
| 7755748 | Device and method for range-resolved determination of scattered light, and an illumination mask | Michael Arnz, Oswald Gromer, Joachim Stuehler, Matthias Manger | 2010-07-13 |
| 7408631 | Device for the range-resolved determination of scattered light, operating method, illumination mask and image-field mask | Michael Arnz, Oswald Gromer, Joachim Stuehler, Matthias Manger | 2008-08-05 |
| 4950355 | Method of and apparatus for manufacturing a mineral fiber insulating web | — | 1990-08-21 |
| 4917750 | Method of and apparatus for manufacturing a mineral fiber insulating web | — | 1990-04-17 |