Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9116447 | Microscope for reticle inspection with variable illumination settings | — | 2015-08-25 |
| 8736849 | Method and apparatus for measuring structures on photolithography masks | Gerd Klose, Michael Totzeck | 2014-05-27 |
| 8718354 | Method for analyzing masks for photolithography | Thomas Scheruebl | 2014-05-06 |
| 7961297 | Method for determining intensity distribution in the image plane of a projection exposure arrangement | Joern Greif-Wuestenbecker, Beate Boehme, Michael Totzeck, Vladimir Kamenov, Olaf Dittmann +3 more | 2011-06-14 |
| 7626689 | Method and device for analysing the imaging behavior of an optical imaging element | Joern Greif-Wuestenbecker | 2009-12-01 |
| 7535640 | Imaging system for emulation of a high aperture scanning system | Michael Totzeck, Joern Greif-Wuestenbecker | 2009-05-19 |
| 7286284 | Microscope imaging system and method for emulating a high aperture imaging system, particularly for mask inspection | Michael Totzeck, Heiko Feldmann, Toralf Gruner, Karl-Heinz Schuster, Joern Greif-Wuestenbecker +3 more | 2007-10-23 |