Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE44216 | Microscope imaging system and method for emulating a high aperture imaging system, particularly for mask inspection | Michael Totzeck, Heiko Feldmann, Toralf Gruner, Karl-Heinz Schuster, Thomas Scheruebl +3 more | 2013-05-14 |
| 7961297 | Method for determining intensity distribution in the image plane of a projection exposure arrangement | Beate Boehme, Ulrich Stroessner, Michael Totzeck, Vladimir Kamenov, Olaf Dittmann +3 more | 2011-06-14 |
| 7626689 | Method and device for analysing the imaging behavior of an optical imaging element | Ulrich Stroessner | 2009-12-01 |
| 7535640 | Imaging system for emulation of a high aperture scanning system | Michael Totzeck, Ulrich Stroessner | 2009-05-19 |
| 7286284 | Microscope imaging system and method for emulating a high aperture imaging system, particularly for mask inspection | Michael Totzeck, Heiko Feldmann, Toralf Gruner, Karl-Heinz Schuster, Thomas Scheruebl +3 more | 2007-10-23 |
| 6894837 | Imaging system for an extreme ultraviolet (EUV) beam-based microscope | Hans-Juergen Dobschal, Thomas Scheruebl, Robert Brunner, Norbert Rosenkranz | 2005-05-17 |