Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8970951 | Mask inspection microscope with variable illumination setting | Ulrich Matejka, Holger Seitz, Mario Laengle | 2015-03-03 |
| RE44216 | Microscope imaging system and method for emulating a high aperture imaging system, particularly for mask inspection | Michael Totzeck, Heiko Feldmann, Toralf Gruner, Karl-Heinz Schuster, Joern Greif-Wuestenbecker +3 more | 2013-05-14 |
| 8264535 | Method and apparatus for analyzing a group of photolithographic masks | Oliver Kienzle, Rigo Richter, Yuji Kobiyama, Thomas Scheruebl | 2012-09-11 |
| 7286284 | Microscope imaging system and method for emulating a high aperture imaging system, particularly for mask inspection | Michael Totzeck, Heiko Feldmann, Toralf Gruner, Karl-Heinz Schuster, Joern Greif-Wuestenbecker +3 more | 2007-10-23 |
| 6894837 | Imaging system for an extreme ultraviolet (EUV) beam-based microscope | Hans-Juergen Dobschal, Thomas Scheruebl, Robert Brunner, Joern Greif-Wuestenbecker | 2005-05-17 |