Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8913120 | Method for emulation of a photolithographic process and mask inspection microscope for performing the method | Eric Poortinga, Thomas Scherübl, Arne Seyfarth | 2014-12-16 |
| 8730474 | Method and apparatus for measuring of masks for the photo-lithography | Thomas Scheruebl, Holger Seitz, Ulrich Matejka, Axel Zibold | 2014-05-20 |
| 8264535 | Method and apparatus for analyzing a group of photolithographic masks | Oliver Kienzle, Norbert Rosenkranz, Yuji Kobiyama, Thomas Scheruebl | 2012-09-11 |