Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10055833 | Method and system for EUV mask blank buried defect analysis | Jan Hendrik Peters, Frederik Blumrich, Anthony Garetto, Renzo Capelli | 2018-08-21 |
| 9431212 | Method for determining the performance of a photolithographic mask | Markus Waiblinger, Michael Budach, Dirk Beyer | 2016-08-30 |
| 8913120 | Method for emulation of a photolithographic process and mask inspection microscope for performing the method | Eric Poortinga, Rigo Richter, Arne Seyfarth | 2014-12-16 |
| 8515154 | Verification method for repairs on photolithography masks | Matthias Wachter, Hans Van Doornmalen | 2013-08-20 |
| 6429897 | Confocal microscope with a motorized scanning table | Eberhard Derndinger, Norbert Czarnetzki, Peter Ott | 2002-08-06 |